| 摘要 |
PROBLEM TO BE SOLVED: To provide a liquid jet head capable of preventing the crack of a substrate and highly accurately forming a reservoir portion and to provide its manufacturing method. SOLUTION: The liquid jet head includes: a flow path forming substrate 10 in which a plurality of pressure generating chambers 12 communicating with a nozzle 21 for jetting a liquid droplet are provided in parallel; a pressure generating means 300 which applies pressure to the inside of the pressure generating chambers 12; and a joined substrate 30 which is joined to one surface of the flow path forming substrate. The flow path forming substrate comprises a (110) orientation silicon single crystal substrate and the end surface in the longitudinal direction of the pressure generating chamber comprises a first (111) surface perpendicular to a (110) surface. Besides, the joined substrate comprises the (110) orientation silicon single crystal substrate and is configured so that the joined substrate is joined to the flow path forming substrate in a direction where the first (111) surface perpendicular to the (110) surface of the joined substrate crosses the first (111) surface of the flow path forming substrate. COPYRIGHT: (C)2009,JPO&INPIT
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