发明名称 Method Of Fabricating Microchannel Plate Devices With Multiple Emissive Layers
摘要 A method of fabricating a microchannel plate includes defining a plurality of pores extending from a top surface of a substrate to a bottom surface of the substrate where the plurality of pores has a resistive material on an outer surface that forms a first emissive layer. A second emissive layer is formed over the first emissive layer. The second emissive layer is chosen to achieve at least one of an increase in secondary electron emission efficiency and a decrease in gain degradation as a function of time. A top electrode is formed on the top surface of the substrate and a bottom electrode is formed on the bottom surface of the substrate.
申请公布号 US2009215211(A1) 申请公布日期 2009.08.27
申请号 US20080038139 申请日期 2008.02.27
申请人 ARRADIANCE, INC. 发明人 TREMSIN ANTON;ROUFFIGNAC PHILIPPE DE;SULLIVAN NEAL T.;BEAULIEU DAVID;POTTER MICHAEL D.
分类号 H01L21/28;B05D5/12 主分类号 H01L21/28
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