发明名称 |
Method Of Fabricating Microchannel Plate Devices With Multiple Emissive Layers |
摘要 |
A method of fabricating a microchannel plate includes defining a plurality of pores extending from a top surface of a substrate to a bottom surface of the substrate where the plurality of pores has a resistive material on an outer surface that forms a first emissive layer. A second emissive layer is formed over the first emissive layer. The second emissive layer is chosen to achieve at least one of an increase in secondary electron emission efficiency and a decrease in gain degradation as a function of time. A top electrode is formed on the top surface of the substrate and a bottom electrode is formed on the bottom surface of the substrate.
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申请公布号 |
US2009215211(A1) |
申请公布日期 |
2009.08.27 |
申请号 |
US20080038139 |
申请日期 |
2008.02.27 |
申请人 |
ARRADIANCE, INC. |
发明人 |
TREMSIN ANTON;ROUFFIGNAC PHILIPPE DE;SULLIVAN NEAL T.;BEAULIEU DAVID;POTTER MICHAEL D. |
分类号 |
H01L21/28;B05D5/12 |
主分类号 |
H01L21/28 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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