发明名称 Flash Memory Device and Method of Fabricating the Same
摘要 The present invention relates to flash memory devices and a method of fabricating the same. In an aspect of the present invention, the flash memory device includes trenches formed in a semiconductor substrate and having a step at their lower portion, a tunnel insulating layer formed in an active region of the semiconductor substrate, first conductive layers formed on the tunnel insulating layer, an isolation layer gap-filling between the trenches and the first conductive layers, and a second conductive layer formed on the first conductive layer and having one side partially overlapping with the isolation layers.
申请公布号 US2009212339(A1) 申请公布日期 2009.08.27
申请号 US20080147194 申请日期 2008.06.26
申请人 HYNIX SEMICONDUCTOR INC. 发明人 DONG CHA DEOK
分类号 H01L21/762;H01L29/788 主分类号 H01L21/762
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