METHOD FOR PRODUCING TRANSPARENT CONDUCTIVE SUBSTRATE

摘要

Disclosed is a method for producing a transparent conductive substrate, by which there can be easily produced a transparent conductive substrate having good conductivity and transparency and comprising a titanium oxide transparent conductive film which is patterned into a desired shape. In this method, a precursor liquid for forming a titanium oxide transparent conductive film is applied onto a transparent substrate and dried at a temperature not more than 350°C, and the thus-obtained coating film is subjected to etching and then to annealing. The precursor liquid for forming a titanium oxide transparent conductive film preferably contains (A) a reaction product obtained by reacting a titanium compound with hydrogen peroxide and (B) a reaction product obtained by reacting a tantalum compound with hydrogen peroxide.