PLASMA GENERATOR

摘要

Disclosed is a plasma generator wherein the volume of a region for generating plasma is increased. A plasma generator (100) has a housing (10) made of a sintered body of alumina (Al2O3). The housing (10) has a slit-like gas introduction section (12), and a discharge section (20) where a plurality of holes are arranged linearly. The width of slit is 1 mm from the gas introduction section (12) to immediately above a plasma region (P). A second discharge section (22) provided with holes (24) having a diameter of 0.5 mm, and a length of 16 mm is formed linearly in the longitudinal direction of the plasma region (P). Rectangular cross-section of the plasma region (P) has one side of 2-5 mm. Electrodes (2a, 2b) have recesses (hollows) in the surfaces facing each other. When a voltage of 60 Hz and 100V is boosted to about 9 kV and applied between the electrodes (2a, 2b) to feed a current of 20 mA and argon is introduced from a gas introduction section (18), generation of plasma is confirmed even if the electrodes (2a, 2b) are separated up to 4 cm. Furthermore, discharge is prevented between the tip of a hole (24) and an object.