METHOD FOR PRODUCING DIELECTRIC LAMINATE AND APPARATUS FOR REMOVING PARTICULATE CARBON-CONTAINING COMPOUND BY USING THE LAMINATE OBTAINED THEREBY

摘要

PROBLEM TO BE SOLVED: To provide a method for producing a dielectric laminate by which an objective catalyst particle which is used for making the most use of characteristics of a plasma discharge field, is easily bonded/fixed to the surface of a dielectric while dispensing with a large-scale apparatus without changing the properties of the objective catalyst particle and without hindering the plasma discharge performance of the dielectric.

SOLUTION: The method for producing the dielectric laminate comprises the steps of: forming a polysilazane-containing solution layer on the surface of the dielectric; scattering the catalyst particle in the polysilazane-containing solution layer to form a catalyst particle layer; solidifying the resulting polysilazane-containing solution layer to bond/fix the catalyst particle layer to the surface of the dielectric.

COPYRIGHT: (C)2009,JPO&INPIT