SEMICONDUCTOR WAFER AND ITS IDENTIFICATION METHOD

摘要

PROBLEM TO BE SOLVED: To provide a semiconductor wafer and its identification method which can identify wafer information while using an existing process without forming wafer information by marking and without adding a new process. SOLUTION: A semiconductor wafer 10 has a silicon (semiconductor) substrate 11 and a chip effective region 12 which is defined in the silicon substrate 11 and includes a plurality of chip regions 15. The chip effective region 12 is rotated at a rotation angle in accordance with wafer information from an in-plane prescribed direction L of the silicon substrate 11. COPYRIGHT: (C)2009,JPO&INPIT