| 摘要 |
PROBLEM TO BE SOLVED: To enhance frame-like sensitivity non-uniformity and color non-uniformity in a peripheral part of a valid pixel region by further reducing a step between regions. SOLUTION: An OB area B for obtaining a black reference signal is provided around an effective pixel region A in which a plurality of photo-detection parts 2 are disposed for generating signal charge by performing photoelectric conversion upon incident light. A first light shielding film 7 is formed on a charge transfer electrode 5 for reading and transferring signal charges, and an insulating film 8 is provided further thereon. In a solid-state imaging device in which a second light-shielding film 9A is provided on the insulating film 8 in the OB area B, on the insulating film 8 of the OB area B, a second light shielding film 9A is separately formed through other steps from the same material layer (TiN layer) as at least one constitutive material constituting the second light-shielding film 9A and is made into thin film. COPYRIGHT: (C)2009,JPO&INPIT
|
