| 摘要 |
PROBLEM TO BE SOLVED: To provide a static eliminator that performes static-elimination operation corresponding to an electric-charge amount required for performing static elimination to an electrically-charged workpiece under an inert-gas atmosphere, and a static elimination method. SOLUTION: The static eliminator has a discharge electrode 3 connected to the ground and a high-voltage power supply 2 for applying at least a negative-polarity high voltage to the discharge electrode 3. The eliminator supports a passive static-elimination mode in which static elimination of an electrically-charged workpiece W is performed up to a prescribed positively charged-voltage value by generating a negative discharging current, generated by self-discharge between the ground and the discharge electrode 3 without applying a voltage to the discharge electrode 3 from the high-voltage power supply 2, between the discharge electrode 3 and the workpiece W electrically charged to a positive polarity being a reverse polarity with respect to a negative polarity that is applicable to the discharge electrode 3, and an active static-elimination mode in which the remaining electric-charge amount of the workpiece electrically charged to the prescribed positively charged-voltage value is reduced up to an allowable value by applying a negative-polarity high voltage to the discharge electrode 3 on predetermined static-elimination conditions after the passive static-elimination mode. COPYRIGHT: (C)2009,JPO&INPIT
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