| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for forming the hard film having satisfactory adhesion by suppressing oxygen thickekening at boundaries in a method for forming a hard film by an arc ion plating method in order to improve the sliding characteristic and wear resistance of the hard film, and to provide a hard film evaluation method capable of nondestructively and easily evaluating the adhesion of the hard film. SOLUTION: The hard film forming method using a hard film forming apparatus 1 is the hard film forming method by an arc ion plating method, in which the concentration of the oxygen existing at the boundaries between workpieces 13, 13, etc., being objects for formation of the hard films and the hard films formed at the workpieces 13, 13, etc., is specified to a preset standard concentration or less. COPYRIGHT: (C)2009,JPO&INPIT
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