| 摘要 |
PROBLEM TO BE SOLVED: To provide a vibration eliminating device using an air spring which prevents contamination of an ambient environment. SOLUTION: The vibration eliminating device 10 comprises: air springs 42a-42e for supporting a vibration elimination object; a dust-free cover for air-tightly surrounding the air springs 42a-42e and expanding in a load direction of the vibration elimination object; and a vacuum pump 24 communicated with an internal space A of the dust-free cover 34 through an exhaust pipe 56 and depressurizing the internal space A. Even when chemical substances are emitted from the air springs 42a-42e or air is leaked, therefore, the chemical substances and air are securely sucked and discharged by the vacuum pump 24, and emission of them into the ambient environment of the vibration eliminating device 10 is prevented. Because external pressures Pa of the air springs 42a-42e are lowered by depressurizing the internal space A, the vibration eliminating device can support a greater load M thereby. COPYRIGHT: (C)2009,JPO&INPIT
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