| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a piezoelectric/electrostrictive element improving a moisture resistance without deteriorating piezoelectric/electrostrictive characteristics and a manufacturing method for the piezoelectric/electrostrictive element. <P>SOLUTION: The vibrational laminate 110 of the piezoelectric/electrostrictive element 10 has a structure laminating an electrode film 112, a piezoelectric/electrostrictive body film 114, the electrode film 116, the piezoelectric/electrostrictive film 118 and the electrode film 120. When manufacturing the piezoelectric/electrostrictive element 10, a laminate structure 100 and a counter electrode 162 are immersed in an electrodeposition coating fluid 164 containing a coating-material component, and the electrodeposition coating fluid 164 is brought into contact with the vibrational laminate 110 and the surface of the counter electrode 162. A voltage is applied between an internal electrode film 134 and the counter electrode 162, an electrophoresis is conducted to the film-material component towards a surface-exposure fault 154 and a film material is electrodeposited selectively on the surface-exposure fault 154. <P>COPYRIGHT: (C)2009,JPO&INPIT |
