CHEMICAL FILTER, ITS PACKING BODY, AND RETICLE STORAGE BOX

摘要

PROBLEM TO BE SOLVED: To provide a chemical filter with a large adsorption capacity capable of easily giving a thin sheet-like shape uniform in the plane direction and in the width direction, its packing body, and a reticle storage box installed with the chemical filter.

SOLUTION: The chemical filter is constituted by storing a platy filtering medium in which a granular adsorbent is held in an air-permeable sheet in an air-permeable bag body. The chemical filter is deaeration-sealed by a sealing sheet to create the chemical filter packing body. Further, the chemical filter is installed at least at a lower central part of a reticle of the reticle storage box.

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