| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a beam detection member and a beam detector using it, capable of exciting visible light more efficiently from a radiation light beam, a soft X-ray beam or the like in the range from high energy to low energy, and detecting its position or an intensity distribution highly accurately and stably for a long period, and manufacturable at lower cost than a conventional detection device. <P>SOLUTION: In the beam detection member 2 for detecting the position or the intensity of a beam 7, a beam irradiation part 6 for irradiating the beam 7 comprises a polycrystal diamond film 4 containing boron (B) averagely 10-150 ppm, and the boron (B) concentration in the polycrystal diamond 4 has an uneven concentration distribution in the film thickness direction of the polycrystal diamond film 4. The beam detector 1 is constituted of such a beam detection member 2 and excitation light observation means 3, 3a for observing excited excitation light 8, 8a. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
