| 摘要 |
An XY table with a measuring arrangement for position determination is described, comprising a fixed reference part (B) and an intermediate part (F) that moves relative to the reference part (B) in a first direction (Y), with an object (O) that moves relative to the intermediate part (F) in a second direction (X), wherein a part to be processed (W) is disposed on the object (O) or on the reference part (B), and for the first direction (X) with at least one 1Dplus encoder (M1, M2) for measuring in-plane degrees of freedom (X, Y, Rz) between the reference part (B) and the intermediate part (F), and for the second direction (X) with at least one 1Dplus encoder (M3, M4) for measuring the in-plane degrees of freedom (X, Y, Rz) between the object (O) and the intermediate part (F), so that the position (Xo, Yo) of a tool center point (TCP) at the object (O) or part (W) can be detected. In the process, the 1Dplus encoder (M1, M2, M3, M4) is disposed constructively such that the projection thereof in the plane spanned by the first and second direction (X, Y), said plane containing the tool center point (TCP), lies within the entire range of motion of the XY table outside of part (W). This allows the maintenance of the Abbe condition and thereby the precise detection of the tool center point (TCP) at the object (O) using simple 1Dplus encoders. |
