| 摘要 |
PROBLEM TO BE SOLVED: To provide a thin film forming method capable of forming a thin film while avoiding apparent stripe irregularity in a prescribed region of a substrate and to provide a method of manufacturing a color filter. SOLUTION: There is provided the thin film forming method, while relatively moving a head having a plurality of nozzles ejecting a liquid material and a substrate disposed opposing to the ejecting part of the nozzle and having a thin film forming region to scan a plurality of times in a prescribed direction, ejecting the liquid material onto the substrate to form a thin film in the thin film forming region of the substrate. In each scanning, the liquid material is ejected by the same nozzle in the plurality of nozzles, as a nozzle ejecting the liquid in other scanning under the same ejection conditions as in the other scanning, onto a region including the thin film forming region of the substrate. After a plurality of times of scanning, the liquid material ejected onto a region out of the thin film forming region on the substrate is removed. COPYRIGHT: (C)2009,JPO&INPIT
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