发明名称 Transport Device, In Particular for Transporting Sheet-Like Substrates Through a Coating Installation
摘要 The transporting device according to the invention, in particular for transporting sheet-like substrates through a coating installation, comprises transporting rollers which are rotatably mounted on both sides and horizontally arranged transversely in relation to the transporting direction, the uppermost surface lines of the transporting rollers defining the transporting plane, and is characterized in that the end parts of the transporting rollers have a smaller diameter than the middle part of the transporting rollers and in that baffles which are mounted displaceably in the axial direction of the transporting rollers between a first position and a second position are arranged between the end parts of the transporting rollers and the transporting plane. The fact that the baffles are mounted in an axially displaceable manner has the effect of considerably extending the cleaning intervals of the transporting device. At first the baffles are arranged in a first position, in which the end of the baffle lies underneath the substrate and, in the horizontal direction, as close as possible to the middle of the transporting roller Vapour-depositing material that gets beyond the edge of the substrate hits the baffle. During operation of the transporting device, the baffles are continuously displaced from the middle part to the ends of the transporting rollers. As a result, the increase in thickness of the layer produced on the baffles is limited, since the vapour keeps hitting new portions of the baffle.
申请公布号 US2009214784(A1) 申请公布日期 2009.08.27
申请号 US20060918009 申请日期 2006.04.07
申请人 VON ARDENNE ANLAGENTECHNIK GMBH;FRIST SOLAR INC. 发明人 VON DER WAYDBRINK HUBERTUS;LAIMER GEORG;SCHEIBE SIEGFRIED;POWELL RICKY C.;HINKLE JAMES ERNEST;FOOTE JAMES B.
分类号 B05D1/00;B05C13/00 主分类号 B05D1/00
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