发明名称 VERFAHREN UND EINRICHTUNG ZUM HALTEN UND ZENTRIEREN VON SUBSTRATEN
摘要 A centering pin arrangement for clamping a substrate with a hole with radius r<SUB>max </SUB>comprises two bolts ( 2, 3 ) with an essentially semicircular cross section K, said bolts having radii r<SUB>2 </SUB>and r<SUB>3 </SUB>respectively. Said radii r<SUB>2 </SUB>and r<SUB>3 </SUB>are different and at least one of the bolts ( 2, 3 ) has a radius bigger or equal to the radius r<SUB>max </SUB>of the hole. In another embodiment both radii r<SUB>2 </SUB>and r<SUB>3 </SUB>are bigger than the radius r<SUB>max </SUB>of the hole.
申请公布号 DE602007001581(D1) 申请公布日期 2009.08.27
申请号 DE20076001581T 申请日期 2007.01.29
申请人 SINGULUS TECHNOLOGIES AG 发明人 EDENHOFER, GEORG;BAZLEN, ROLF
分类号 G11B7/26 主分类号 G11B7/26
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