| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an actuator which has an improved operation accuracy. <P>SOLUTION: The actuator is provided with a frame body 17 having a hole 16 on a surface, a transmission electrode portion 18 arranged on an upper side of the hole 16, and a driving portion 20 of which the one end is connected with both ends of the transmission electrode portion 18 and the other end is supported by the frame body 17. The driving portion 20 is composed of a lower metallic layer 21, a piezo-electric film 22 formed on the metallic layer 21, an upper metallic layer formed on the piezo-electric film 22, and an elastic resin layer laminated on the upper metallic layer 23. Since the transmission electrode portion is prevented from being inclined and an effect on a displacement degree of an entire driving portion 20 can be made small even if a surface layer is corroded in an etching process, the operation accuracy of the actuator can be improved. <P>COPYRIGHT: (C)2009,JPO&INPIT |
