| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a low cost device for detecting an angular velocity and an acceleration, that is easy to be evaluated and mounted, that is capable of obtaining stable output with better productivity and smaller output drift, that is fast to impact from outside, and that is capable of detecting a biaxial angular velocity and a biaxial acceleration. <P>SOLUTION: The biaxial angular velocity and the biaxial acceleration output is obtained by supporting additional mass parts (4a, 4b, 4c, 4d) formed in a plane with beams (3a, 3b, 3c, 3d) respectively formed in the same plane, supporting a connecting part of the beam (3a) and the beam (3d) with one end of the beam (3e), supporting a connecting part of the beam (3b) and the beam (3c) with one end of the beam (3f), supporting an oscillator (1) connecting another ends of the beam (3e) and the beam (3f) with a frame body (2) of a periphery via the beams (3g, 3h), and exciting one driving mode by using an oscillator for functioning as an exciting part and a detecting part to detect four detection modes. <P>COPYRIGHT: (C)2009,JPO&INPIT |
