| 摘要 |
<P>PROBLEM TO BE SOLVED: To improve the positioning accuracy and/or settling time of a substrate supported by a movable support or an exchangeable object such as a patterning device. <P>SOLUTION: The movable support is configured to hold the exchangeable object. The support includes a movable structure configured to be movable relative to a reference object, an object holder configured to be movable relative to the movable structure and hold the exchangeable object, an actuator configured to move the movable structure relative to the reference object, and a minimum stroke actuator configured to move the object holder relative to the movable structure. The stiffness of the minimum stroke actuator is substantially larger than at least a degree of stiffness of the actuator. <P>COPYRIGHT: (C)2009,JPO&INPIT |
