| 摘要 |
PROBLEM TO BE SOLVED: To obtain a liquid droplet ejecting head which can prevent poor joining of an electrode substrate and a cavity substrate and decrease of the ejection capability, suppresses increase of material costs and manufacturing costs, and can be made compact. SOLUTION: The liquid droplet ejecting head is equipped with a reservoir recessed part 16 which is formed to a surface where an individual electrode 12 of the electrode substrate 10 is formed and which becomes a reservoir for feeding a liquid to an ejecting chamber 21, a recessed part 13 for mounting which is formed to an opposite surface of the surface where the individual electrode 12 of the electrode substrate 10 is formed and which mounts thereon a driver IC 40 for controlling an electrostatic actuator, a buried wiring line 26 which penetrates the electrode substrate 10 at a bottom part of the recessed part 13 for mounting connecting the driver IC 40 with the individual electrode 12, a through-hole 24 which is formed in the cavity substrate to make the reservoir recessed part 16 and the ejecting chamber 21 communicate with each other, and a recessed part 26 for contact prevention which is formed at a position opposed to a connecting part between the individual electrode 12 and the buried wiring line 14 of the cavity substrate 20 to prevent contact between the connecting part and the cavity substrate 20. COPYRIGHT: (C)2009,JPO&INPIT
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