发明名称 |
High brightness excimer lamp |
摘要 |
A high brightness excimer light source has an elongated tube containing an excimer-forming gas and electrodes for exciting the gas to form a plasma, and thus create excimers such as a rare gas halogen excimer or a rare gas excimer. Light emitted from the excimer propagating axially along the tube passes out of the tube through an exit device such as a lens or optical fiber at one or both ends of the tube.
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申请公布号 |
US2009212700(A1) |
申请公布日期 |
2009.08.27 |
申请号 |
US20080072108 |
申请日期 |
2008.02.22 |
申请人 |
RUTGERS, THE STATE UNIVERSITY |
发明人 |
MASOUD NAZIEH MOHAMMAD;MURNICK DANIEL E. |
分类号 |
H01J61/30;H01J61/04;H01J61/16;H01J61/24 |
主分类号 |
H01J61/30 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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