Piezoelectric MEMS switch and method of fabricating the same

摘要

A piezoelectric Micro Electro Mechanical System (MEMS) switch includes a substrate (101), first and second fixed signal lines (103,105) symmetrically formed in a spaced-apart relation to each other on the substrate to have a predetermined gap (G) therebetween, a piezoelectric actuator (130) disposed in alignment with the first and the second fixed signal lines (103,105) in the predetermined gap (G), and having a first end supported on the substrate (101) to allow the piezoelectric actuator to be movable up and down, and a movable signal line (150) having a first end connected to one of the first and the second fixed signal lines, and a second end configured to be in contact with, or separate from the other of the first and second fixed signal lines, the movable signal line at at least one side thereof being connected to an upper surface of the piezoelectric actuator (130).