METHOD OF FABRICATING SAWTOOTH GRATINGS AND METHOD OF MANUFACTURING DIFFRACTIVE OPTIC ELEMENTS USING THEREOF

摘要

A method for forming a serrated grating and a method for manufacturing a diffractive optical device are provided to improve the efficiency of a diffractive grating by forming a resin substrate using the linear serrated mold. A photoresist pattern is formed on a substrate. An etching beam is irradiated to the substrate with the photoresist pattern. The photoresist pattern and the substrate are etched by irradiating the etching beam. The mold with the grating on the surface is formed by etching the photoresist pattern and the substrate. The resin substrate with the grating is formed using the mold.