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发明名称
Method and apparatus for heating a substrate
摘要
申请公布号
EP1933370(A3)
申请公布日期
2009.08.26
申请号
EP20070024237
申请日期
2007.12.13
申请人
APPLIED MATERIALS, INC.
发明人
RANISH, JOSEPH, M.;ADAMS, BRUCE, E.;HUNTER, AARON, M.
分类号
H01L21/00
主分类号
H01L21/00
代理机构
代理人
主权项
地址
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