发明名称 MEASUREMENT DEVICE AND MEASUREMENT METHOD
摘要 A measurement device having a light sending section for sending light to a first direction that is the direction of the depth of a hollow, a conversion section for converting the direction of the light to the circumferential direction perpendicular to the first direction, a detection section for detecting that portion of light, the direction of which light is converted by the conversion section, that is reflected by the inner side of an object to be measured, and a shape measurement section for measuring the shapes of the inner side of the object by obtaining displacements from a predetermined reference position based on the result of detection by the detection section. The shapes of the hollow in the object can be obtained at the same time without rotating the object or a light source, and the measurement device enables highly accurate measurement. ® KIPO & WIPO 2009
申请公布号 KR20090091218(A) 申请公布日期 2009.08.26
申请号 KR20097014474 申请日期 2007.12.07
申请人 NIKON CORPORATION 发明人 AOKI HIROSHI;KOMATSU KOICHIRO
分类号 G01B11/24;G01N21/954 主分类号 G01B11/24
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