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发明名称
Method for producing an SOI wafer
摘要
申请公布号
EP1009024(B1)
申请公布日期
2009.08.26
申请号
EP19980830743
申请日期
1998.12.10
申请人
STMICROELECTRONICS S.R.L.
发明人
BARLOCCHI, GABRIELE;VILLA, FLAVIO
分类号
H01L21/301;H01L21/762;H01L27/12
主分类号
H01L21/301
代理机构
代理人
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地址
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