CONTACTLESS TEMPERATURE MONITORING DEVICE FOR THIN FILM FORMING APPARATUS

摘要

A contactless temperature monitoring device for a thin film forming apparatus is provided to maintain a transparent window clean always by preventing a source material disappearing from being deposited on the transparent window. The light guide plate(110) passing a copied light from a target is mounted at one end of a body(114). The transparent window(112) passing the light from the light guide plate is mounted at the other side of the body. An optical guiding hole is formed at the center of an anode plate and a cathode plate. A plurality of exhaust holes are formed in the circumference of the light guide hole. A power supply unit supplies a DC high voltage between the anode plate and cathode plate.