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发明名称
METHOD AND APPARATUS FOR PREVENTING INSTABILITIES IN RADIO-FREQUENCY PLASMA PROCESSING
摘要
申请公布号
EP2092547(A1)
申请公布日期
2009.08.26
申请号
EP20060827331
申请日期
2006.10.31
申请人
MKS INSTRUMENTS, INC.
发明人
KISHINEVSKY, MICHAEL
分类号
H01J37/32;H05H1/46
主分类号
H01J37/32
代理机构
代理人
主权项
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