| 摘要 |
A system and method for evaluating wafer test probe cards (50) under real-world wafer test cell conditions integrates certain wafer test cell components into the probe card inspection and analysis process. Disclosed embodiments may utilize existing and/or modified wafer test cell components such as, a head plate (360), a test head (330), a signal delivery system (340), and a manipulator to emulate wafer test cell dynamics during the probe card inspection and analysis process. ® KIPO & WIPO 2009
|
