| 摘要 |
<p>A dilution treatment apparatus of flammability a wastewater produced in the manufacturing process of the silicon wafer and the method thereof are provided to a fire due to an electric spark by turning a propeller using a cylinder of air supply. A combustibility wastewater generated from the manufacturing apparatus for semiconductor the wastewater reservoir(110) is stored. A diluent input part dilutes the wastewater by inputting diluent, and an upper part sensor(132) and lower sensor(131) restrict the upper and lowest limit of the wastewater accumulated inside the wastewater reservoir. A propeller(141) dilutes the wastewater by the rotation of the propeller while being installed inside the wastewater reservoir.</p> |
