CONFOCAL THREE-DIMENSIONAL SCANNING APPARATUS AND SCANNING METHOD FOR THE SAME

摘要

A confocal three-dimensional scanning apparatus and scanning method for the same area provided to perform the exact control action by moving only the objective lens instead of moving the entire device for scanning. The light-generating unit(100) provides the first illuminating beam. The objective lens(206) of cylindrical focuses the first illuminating beam from the light-generating unit on the fixed position of the objects(207) to the first light-line of the line profile. The objective lens collects the light which is scattered with the objects. The scanning unit(200) comprises the first conveying unit which linearly transfers the objective lens in the X-axis direction and the second conveying unit(422) which linearly transfers the objective lens in the Z-axis direction. The light accepting lens(300) focuses the light collected by the objective lens. The slit mask(310) is arranged on the focal plane of the light accepting lens.