WATER CUTTING OILS AND THE PRODUCTION SYSTEM AND THE METHOD THEREOF FOR SILICON INGOT

摘要

Cutting fluid for the silicon ingot cutting and manufacturing device and a method of manufacture thereof are provided, which increase cutting speed and improve quality of the silicon wafer. A cutting fluid manufacturing method for the silicon ingot cutting comprises: a step(S10) for mixing the water-soluble polyalkylene glycol ester and the dispersibility polyalkylene glycol ester; a step(S20) for saponifying the manufactured acceptance/dispersibility polyalkylene glycol ester mixed solution; a step(S30) for performing mixing the solid particle flotation; a step(S40) for performing the solid particle dispersion process; and a step(S50) for performing the anticorrosive agent mixing process.