ELECTROMAGNETIC RADIATION SENSOR WITH DIFFRACTIVE OPTICAL ELEMENT AND APERTURE STOP

摘要

The invention provides a sensor including a first sensor element (105) formed in a first substrate (110) and at least one optical element formed in a second substrate, the first and second substrates being configured relative to one another such that the second substrate forms a cap (115) over the first sensor element. The cap (115) includes a dif tractive optical element and an aperture stop (901) which collectively determine the wavelength of incident radiation (125) that is allowed through the cap (115) and onto the element (105).