发明名称 |
METHOD FOR FABRICATING MICRO-LENS |
摘要 |
Provided is a method of fabricating a micro-lens, including preparing a substrate having a step on top, forming a protection layer on the entire top surface of the substrate having the step, etching the entire surface of the protection layer to form a micro-lens having a radius of curvature on a top surface of the step, and etching the entire surface of the substrate having the micro-lens for the top surface of the step to be formed in a lens shape. Thus, the micro-lens can be integrated with a photoelectronic device in a self-aligned structure, and an additional process for forming the micro-lens is not necessary, so that the photoelectronic device in which the micro-lens is integrated can be fabricated more economically.
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申请公布号 |
WO2009084852(A3) |
申请公布日期 |
2009.08.20 |
申请号 |
WO2008KR07638 |
申请日期 |
2008.12.24 |
申请人 |
GWANGJU INSTITUTE OF SCIENCE AND TECHNOLOGY;SONG, YOUNG MIN;CHANG, KI SOO;JEONG, BONG KYU;LEE, YONG TAK |
发明人 |
SONG, YOUNG MIN;CHANG, KI SOO;JEONG, BONG KYU;LEE, YONG TAK |
分类号 |
G02B1/12 |
主分类号 |
G02B1/12 |
代理机构 |
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地址 |
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