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发明名称
ANTIREFLEX-ZUSAMMENSETZUNG FÜR EINEN FERNEN-UV-EMPFINDLICHEN FOTORESIST
摘要
申请公布号
DE69941091(D1)
申请公布日期
2009.08.20
申请号
DE19996041091
申请日期
1999.11.09
申请人
AZ ELECTRONIC MATERIALS USA CORP.
发明人
PADMANABAN, MUNIRATHNA;DAMMEL, RALPH R.;FICNER, STANLEY A.;OBERLANDER, JOSEPH E.;SAGAN, JOHN P.
分类号
G03F7/09;G03F7/11;G03F7/038;H01L21/027
主分类号
G03F7/09
代理机构
代理人
主权项
地址
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