| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a tray for conveying a work which facilitates conveying in and out stacked trays. <P>SOLUTION: The tray 1 for conveying the work is used for conveying a substrate S, and includes crosspieces 4, a rectangular outer frame 2, and a supporting part 14b. The crosspieces 4 have a work placing face for placing the substrate S. The supporting part 14b is provided on the outer frame 2 and supports the crosspieces 4. The outer frame 2 has a downward slope toward the outside from the supporting part 14b, and has an inclined part 13 whose lower end part is lower than the work placing face. <P>COPYRIGHT: (C)2009,JPO&INPIT |
