| 摘要 |
PROBLEM TO BE SOLVED: To provide a micro valve which can perform highly-reliable operation by suppressing the occurrence of a sticking phenomenon. SOLUTION: The micro valve is formed by using a semiconductor substrate, and comprises: a frame 11; a valve body 12; a valve body substrate 1 having a beam 13; a valve seat substrate 2 which has a valve hole 21 opened at its surface, and is mounted with the valve body substrate 1 by fixing the frame 11 on the surface so that the valve body 12 coincides with the valve hole 21; and a first substrate 3 mounted to the surface opposite to the valve seat substrate 2 side in the valve body substrate 1. On at least one surface of opposing faces of the valve body 12 and the valve seat substrate 2, there are formed a plurality of micro protrusions 8 which are designed in height so that a fluid leak amount is set within a tolerable range in a state that the valve hole 21 is closed by the valve body 12, and prevent the adhesion of the valve body 12 and the valve seat substrate 2. COPYRIGHT: (C)2009,JPO&INPIT |
