| 摘要 |
PROBLEM TO BE SOLVED: To prevent the cutting of a dicing sheet, damage to a chuck table and the fusion bonding of a dicing sheet to a chuck table by laser light in laser dicing. SOLUTION: The laser dicing sheet is characterized in that it includes a base material formed of poly (oxy-alkylene) and an adhesive layer formed on one side thereof. COPYRIGHT: (C)2009,JPO&INPIT
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