DEVICE FOR MANUFACTURING DISPLAY ELEMENT SUBSTRATES

摘要

PROBLEM TO BE SOLVED: To provide a device for manufacturing display element substrates capable of suppressing uneven characteristics of a film formed on a large-sized glass substrate. SOLUTION: A process chamber 12 is provided to give a quick heat treatment to a large-sized glass substrate 14 for liquid crystal panels. The process chamber 12 is equipped with a pedestal 13 having a plurality of supporting pin 15 to partially support the back of the large-sized glass substrate 14 in the chamber 12. A pin heating mechanism 16 is provided to control temperatures of the supporting pins 15 according to the quick heat treatment in the process chamber 12. This configuration can suppress the difference in temperature at positions where the supporting pins 15 are in contact with the large-sized glass substrate 14 and at the other positions and can suppress uneven characteristics of the polycrystalline silicon film 42 formed on the large-sized glass substrate 14. COPYRIGHT: (C)2009,JPO&INPIT