| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing an organic electroluminescent element for preventing surface roughness or peel-off of a lower electrode in its formation, and thereby aiming at improvement of light emission characteristics and a yield rate. SOLUTION: A conductive film 3 is formed on a substrate 1, and a lower electrode 3a is formed by patterning the conductive film 3 by etching with the use of a resist pattern 5a formed on the conductive film 3 as a mask. An insulating film 7 covering a laminate of the lower electrode 3a and the resist pattern 5a is formed on the substrate. A pixel opening 7a exposing the lower electrode 3a is formed at a laminated part of the insulating film 7 and the resist pattern 5a. An upper electrode 11 is formed on the lower electrode 3a at a bottom part of the pixel opening 7a with an intercalation of an organic light-emitting function layer 9 to obtain the organic electroluminescent element EL. COPYRIGHT: (C)2009,JPO&INPIT
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