发明名称 MOTHER SUBSTRATE, FILM FORMATION REGION ARRANGEMENT METHOD, AND COLOR FILTER MANUFACTURING METHOD
摘要 A mother substrate for forming a plurality of substrate elements includes a first film formation region and a second film formation region. The first film formation region corresponds to a first substrate element and includes at least one first film formation section. The second film formation region corresponds to a second substrate element and includes at least one second film formation section, the second film formation section having a film formation surface area that is smaller than a film formation surface area of the first film formation section. The second film formation region is disposed in a position closer to a center of rotation of the mother substrate than the first film formation region when the mother substrate is placed on a rotation device of a film formation apparatus during arrangement of a film material on the mother substrate.
申请公布号 US2009208853(A1) 申请公布日期 2009.08.20
申请号 US20090359529 申请日期 2009.01.26
申请人 SEIKO EPSON CORPORATION 发明人 SAKAMOTO KENJI
分类号 G03F5/00 主分类号 G03F5/00
代理机构 代理人
主权项
地址