发明名称 |
Near Field Exposure That Reduces Scatter of a Surface Plasmon Polariton Wave Going Around a Light Blocking Member |
摘要 |
An exposure mask in which exposure of an exposure object is carried out on the basis of near field light leaking from a plurality of openings provided in a light blocking member in a mutually adjoining relation, in which the spacing between adjacent openings is not greater than the wavelength of light used for the exposure, and an end portion of the opening at the exposure object side has a structure effective to reduce scatter of a surface plasmon polariton wave going around to the exposure object side of the light blocking member. |
申请公布号 |
US2009207398(A1) |
申请公布日期 |
2009.08.20 |
申请号 |
US20090434992 |
申请日期 |
2009.05.04 |
申请人 |
CANON KABUSHIKI KAISHA |
发明人 |
KURODA RYO;MIZUTANI NATSUHIKO;YAMADA TOMOHIRO |
分类号 |
G03B27/72;G03F1/08;G03B27/32;G03F1/00;G03F1/14;G03F1/70;G03F7/20;H01L21/027 |
主分类号 |
G03B27/72 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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