摘要 |
PROBLEM TO BE SOLVED: To provide a ceramic laminated substrate which is capable of restraining the reflection of high frequency properties and improving the frequency properties, and its manufacturing method. SOLUTION: A plurality of ceramic layers which are provided with a pad on the surface and an internal wiring inside are laminated to constitute a ceramic laminated substrate. Vias which are inclined at a prescribed angle against the ceramic layers are used to carry out an electrical connection between the ceramic layers. COPYRIGHT: (C)2009,JPO&INPIT |