发明名称 METHOD OF FABRICATING PIEZOELECTRIC VIBRATION PIECE, PIEZOELECTRIC VIBRATING PIECE, WAFER, PIEZOELECTRIC VIBRATOR, OSCILLATOR, ELECTRONIC APPARATUS AND RADIOWAVE TIMEPIECE
摘要 To carry out frequency adjustment easily, accurately and efficiently without being influenced by a size of a piezoelectric vibrating piece and achieve low cost formation and promotion of maintenance performance, there is provided a method of fabricating a piezoelectric vibrating piece which is a method of fabricating a piezoelectric vibrating piece having a piezoelectric vibrating plate 11, a pair of exciting electrodes 12, 13, and a pair of mount electrodes 15, 16 by utilizing a wafer S, the method including an outer shape forming step of forming a frame portion S1 at a wafer and forming a plurality of piezoelectric plates at the frame portion to be connected thereto by way of a connecting portion 11a, an electrode forming step of forming pairs of exciting electrodes and pairs of mount electrodes respectively at the plurality of piezoelectric plates and forming a common electrode S2 respectively electrically connected to a plurality of the pairs of mount electrodes 15 on one side by way of the connecting portion, a frequency adjusting step of adjusting a frequency of the piezoelectric plate by applying a drive voltage between the common electrode and the mount electrode 16 on other side, and a cutting step of fragmenting the plurality of piezoelectric plates.
申请公布号 US2009205179(A1) 申请公布日期 2009.08.20
申请号 US20090360435 申请日期 2009.01.27
申请人 KOBAYASHI TAKASHI 发明人 KOBAYASHI TAKASHI
分类号 H01L41/22;G01R29/22 主分类号 H01L41/22
代理机构 代理人
主权项
地址