PROCESS CHAMBER AND FPD MANUFACTURING MACHINE HAVING THE SAME

摘要

A processing chamber and a flat panel display manufacturing device including the same for performing inspection lamp are provided to repair the inside or outside of a chamber main body by separating a lid of the chamber main body from a body. A chamber body(120) comprises a lead covering the upper of this body and the body in which the upper portion is opened. In order to have from floor in the fixed height the lead of the chamber body is positioned to the revolving element, the chamber body is supported in order to be rotatable. A lifting element(160) supports the combination of the body of the chamber body and lead or the separation body in order to move up and down.