LIQUID PROCESSING SYSTEM, LIQUID PROCESSING METHOD AND STORAGE MEDIUM

摘要

A liquid processing system comprises a hollow holding plate (1) for holding a workpiece (W), a hollow outer rotary shaft (2) connected and fixed to the holding plate (1), a lift pin plate (20) having a lift pin (21) for supporting the workpiece (W), an inner rotary shaft (22) connected and fixed to with the lift pin plate (20), and an elevating member (16) for elevating the lift pin plate (20) and locating the lift pin plate (20) at an upper position and a lower position. A cleaning liquid supply section (30) for supplying a cleaning liquid to the workpiece (W) is disposed in the inner rotary shaft (22). An outer rotation drive section (40) for rotationally driving the outer rotary shaft (2) is connected to the outer rotary shaft (2). An inner rotation drive section (10) for rotationally driving the inner rotary shaft (22) is connected to the inner rotary shaft (22).