LIQUID OPTICAL DEFLECTOR AND METHOD FOR FABRICATING THE SAME

摘要

A liquid optical deflector comprises a substrate (100) with an electrode layer (102) disposed on the substrate (100). An insulating layer (104) is on the electrode layer (102), which having an exposed region. A first electrode wall (106A) provided with a first insulating wall (108) and a second electrode wall (106B) provided with a second insulating wall (108) right up from the substrate (100). A side wall rights up from the substrate and connects between the first and second electrode walls (106A, 106B) to form a containing space. A first liquid (110) is filled in the containing space in contacting with the electrode layer (102) on the substrate (100). A second liquid (112) is filled in the containing space to have an interface with the first liquid (110) without solving to each other. A cap layer (114) seals over the containing space to form an optical deflector unit.