发明名称 |
ELECTRON SOURCE STRUCTURE, AND ELECTRON SOURCE STRUCTURE DRIVE DEVICE |
摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an electron source structure capable of stably extracting a minute beam for a long period by stably holding an electron emission cathode, and to provide an electron source structure drive device. <P>SOLUTION: The electron source structure includes at least: the electron emission cathode formed of diamond; a pair of conductive posts holding the electron emission cathode; a metal screw and a nut for generating stress for holding the electron emission cathode by penetrating the conductive post; an insulating insulator for keeping electrically insulation between the metal screw and nut, and the conductive post by being penetrated by the metal screw and the nut; a pair of electrode terminals for fixing the conductive post; and an insulator equipped with the terminals. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
申请公布号 |
JP2009187767(A) |
申请公布日期 |
2009.08.20 |
申请号 |
JP20080025923 |
申请日期 |
2008.02.06 |
申请人 |
SUMITOMO ELECTRIC IND LTD |
发明人 |
YAMAMOTO YOSHIYUKI;UEDA AKIHIKO;NISHIBAYASHI YOSHIKI;IMAI TAKAHIRO |
分类号 |
H01J1/15;H01J1/18;H01J1/304;H01J37/07;H01J37/073 |
主分类号 |
H01J1/15 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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